List of Chemicals Analyzed : Typical Semiconductor Acids - Bases - Mixtures



Legend: Blue indicates established and validated method.
TRACES
ICPMS/GFAA
IC-ANIONS IC-CATIONS ASSAY PARTICLES
ED-XRF
Acetic Acid
Amnonium Hydroxide
BOE / BHF's
Citric Acid
Hydrochloric Acid
HydroFluoric Acid 49%
HydroFluoric Acid diluted
Hydrogen Peroxide
MAE's
NH4F
Nitric Acid
Phosphoric Acid
Potassium Hydroxide
SC1
SC2
Sodium Hydroxide
Slurries
Spin-Etchants
Sulfuric Acid
TMAH
Water

… and many more chemicals. Do not hesitate to call if your specific chemical is not listed above.


Acronym Common Chemical Name
BOE "Buffered Oxide Etch", mixture of NH4F and HF
BHF "Buffered HF", is another acronym for BOE
MAE's "Mixed Acid Etchants". Multiple combination of 2 or 3 Acids including but not limited to:
  • H2SO4
  • HNO3
  • H3PO4
  • NH4F
  • HF
  • HCl
  • CH3COOH
SC1 Mixture of NH4OH + H2O2 [+ water]
SC2 Mixture of HCl + H2O2 [+ water]
Spin-Etchants Mixtures of 3 to 4 Acids including but not limited to:
  • H2SO4
  • HNO3
  • H3PO4
  • HF
  • HCl
TMAH Tetramethyl Ammonium Hydroxide
[Developer and cleaning agent]